- Planar Semiconductor Sensor
- Detects the change in resistance accompanying the gas detection reaction on thick-film semiconductor surfaces a few micrometers to tens of micrometers thick.
Detection Principle
Features
- More sensitive than the semiconductor sensor.
- Selective to gases（Cl2, H2S, EO, etc.）
- Self-cleaning effect on the surface ensuring high repeatability and long-term stability due to high working temperature.
