Semiconductor Gas Detector PS-7
-
-
- Model
- PS-7
- Target Gas
- Semiconductor manufacturing gases, hydrogen, oxygen etc.
- Detection Principle
- Electrochemical cell, Hot wire semiconductor, Galvanic cell
- Gas Concentration Indication
- 4-digit LCD (with measuring unit), 20-step bar graph
- Dimensions
- W62 x H124 x D143 mm (excluding options and protrusions)
Can be used for a variety of semiconductor gases by changing a plug and play gas sensor.
System Configuration
Features
- Sensor units are already calibrated when delivered to the site. Sensor units only need zero check and operation checks after being replaced, and they are ready to monitor gas consentration.
- Used sensor units are returned when obtaining new ones so they can be recycled.
- Sensor units and gas flow path can be replaced without tools.
- All functional parts are in modules for easy replacement.
- The Cosmos assists in reliable management of the timing for sensor unit and gas flow path replacement.
Specifications
Model | PS-7 | |
Standard Type | With a Pyrolyzer | |
Detection Principle | Electrochemical cell,
Hot wire semiconductor, Galvanic cell |
Pyrolysis + Electrochemical cell |
Sampling Method | Extractive type (Sample flow rate: 0.5L/min, automatic control) | |
Sampling Tubing*1 | Teflon – External diameter: 6mm, Internal diameter: 4mm, Tubing length: 20m or less | |
Gas Concentration
Indication |
4-digit LCD (with measuring unit), 20 – step bar graph | |
Alarm Indication | Gas alarm (1st and 2nd atage) – Alarm: Red LED lamp flashing LCD – ALARM1 for 1st stage, ALARM1 and ALARM2 for 2nd stage Low flow alarm – Clogging indication: LCD – Flow sign rotates slowly – Alarm: Yellow LED lamp flashing LCD – FLOW indication, Flow sign stops rotating Sensor trouble alarm/Incorrect sennsor insertion alarm – Alarm: Yellow LED lamp flashing LCD – SENS. indication Pyrolyzer wire break alarm*2 – Alarm: Yellow LED lamp flashing LCD – CONV. indication |
|
Eternal Output | – Gas concentration analog output: 4-20 mADC (shared with the power source
negative terminal) |
|
Application Cable | 3C or 4C shielded control cable (φ8-11mm) x 2 | |
Operating Temperature
/ Humidity |
0 to 40 °C (No sudden change)
30 to 85 %RH (No condensation) |
|
Power Source | 24 VDC ±10% | |
Power Consumption | Approx. 7W | |
Dimensions | W62 X H124 X D143 mm (excluding options and protrusions) | |
Weight | Approx. 1.0kg | |
Installation | Wall mount | |
Approval | CE, SEMI (Semiconductor Equipment and Material Standard) |
*1 Teflon is recommended. But it depends on operating conditions when the gas adsorption capacity is high, so contact us for more information. The specifications above are subject to change without prior notice.
*2 Only for the model with a pyrolyzer.
List of detectable gases (sensor unit)
Gases
|
Full Scale
|
Detection Principle
|
Model No. |
SiH4
|
5 / 25ppm
|
Electrochemical
|
CDS-7
|
PH3
|
1ppm
|
||
B2H6
|
500ppb
|
||
AsH3
|
250ppb
|
||
H2Se
|
250ppb
|
||
Si2H6
|
25ppm
|
||
SiH2Cl2
|
25ppm
|
||
GeH4
|
1ppm
|
||
NH3
|
100ppm
|
||
HF
|
10ppm
|
||
PF3
|
10ppm
|
||
HCl
|
5 / 25ppm
|
||
HBr
|
10ppm
|
||
F2
|
5ppm
|
||
Cl2
|
5ppm
|
||
ClF3
|
1ppm
|
||
O3
|
1ppm
|
||
CO
|
250ppm
|
||
H2S
|
50ppm
|
||
NF3
|
100ppm
|
Electrochemical
with pyrilyzer |
|
CCl4
|
100ppm
|
||
H2
|
500 / 1000ppm
|
Hot wire semiconductor
|
CHS-7
|
O2
|
25vol%
|
Galvanic cell
|
COS-7
|
*Please contact your representative for gases other than those listed.
Approvals
*Some types are excluded. Please contact us for farther information.
SEMI (Semiconductor Equipment and Material Standard)