Desktop Type Gas Detector PGD-120
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- Model
- PGD-120
- Gas Detected
- Semiconductor manufacturing gases, combustible gas and oxygen
- Detection Principle
- Electrochemical, Hot wire semiconductor, Galvanic cell
- Detection Range
- As per specifications
- Dimensions
- W164 x H210 x D220 mm
Desktop type to monitor over 20 gases by changing a plug and play gas sensor.
Applications
For continuous monitoring of small scale equipment at university and research institutes etc.
Features
- Easy to monitor over 20 gases simply by changing a plug and play sensor.
- Maintenance free
- Portable and fkexible
- NF3 monitoring is available. (model specify)
Specifications
Model | PGD-120 | |
Detection Principle | Electrochemical, Hot wire semiconductor, Galvanic type |
|
Sampling Method | Extractive type | |
Detection Range | As per specifications | |
Gas Concentration Display |
4-digit digital LCD display (incl. unit) | |
Alam Set Point | 2 stage alarm type (adjustable) | |
Alarm Display | Alarm lamp, Buzzer (no buzzer selectable) | |
External Output | Analog | 4-20 mA |
Alarm 1 | 1c voltage contact | |
Alarm 2 | 1c voltage contact | |
Trouble alarm | 1c voltage contact | |
Contact Capacity | 125 VAC, under 5 A | |
Power Supply | 100 VAC to 220 VAC | |
Dimensions | W164 x H210 x D220mm | |
Weight | Approx. 5kg | |
Options | Battery, Pyrolyzer for NF3 |
List of detectable gases
Gases | Full Scale |
SiH4 | 5/25ppm |
PH3 | 1ppm |
B2H6 | 500ppb |
AsH3 | 250ppb |
H2Se | 250ppb |
GeH4 | 1ppm |
HF | 10ppm |
BCl3 | 25ppm (※1) |
SiH2Cl2 | 25ppm |
Si2H6 | 25ppm |
F2 | 5ppm |
Cl2 | 5ppm |
HBr | 10ppm |
HCl | 5/25ppm |
CO | 250ppm |
ClF3 | 1ppm |
NO2 | 10ppm |
H2S | 50ppm |
O3 | 1ppm |
BF3 | 10ppm (※2) |
PF3 | 10ppm |
NH3 | 100ppm |
NF3 | 100ppm |
H2 | 1000ppm |
O2 | 25vol% |
※1 加水分解でHClガスにて検知
※2 加水分解でHFガスにて検知