Gas Leak Detector XP-703DIII
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- Model
- XP-703DIII
- Gas Detected
- Hydrogen, Arsine, Diborane, Silane and Phosphine
- Detection Principle
- Hot-wire semiconductor sensor
- Sampling Method
- Extractive
- Weight
- Approx. 190g (including batteries and soft case)
To detect trace amounts of various semiconductor manufacturing gases.
Applications
- For gas leak inspection at semiconductor factory where there is toxic gas.
- Safety for hydrogen-related equipment.
Features
- Can detect trace amounts of various semiconductor manufacturing gases.
- Automatic stop pump function
- Automatic gas exhaust mode
- Equivalent to IP22 (in soft case)
Specifications
| Model | XP-703DIII |
| Gas Detected | Hydrogen, Arsine, Diborane, Silane and Phosphine |
| Detection Principle | Hot wire semiconductor sensor |
| Sampling Method | Extractive |
| Detectable Leak Rate |
H2: 5.07 x 10-7, AsH3: 2.53 x 10-7, B2H6: 1.01 x 10-7, SiH4: 2.53 x 10-7, PH3: 1.52 x 10-7 |
| Detectable Gas Concentration |
H2: 1.0ppm, AsH3: 0.5ppm, B2H6: 0.2ppm, SiH4: 0.5ppm, PH3: 0.3ppm |
| Response Time | Within 10 seconds (for 300% of detectable gas concentration) |
| Power Supply | Size AA alkaline batteries x 2 |
| Battery Life*1 | Approx. 12 hours (with size AA alkaline batteries) |
| Degree of Protection | Equivalent to IP22 |
| Operating Pressure | Atmospheric pressure (800 to 1100 hPa) |
| Operating Temperature/Humidity |
0 to +40°C Less than 85%RH (with no condensation) |
| Dimensions | Approx. W38 x H130 x D32 mm (excluding protrusions) |
| Weight | Approx. 190g (including batteries and soft case) |
| Accessories | Soft case, Drain Filter, Replacement Filter, Gas Probe, Dust Filter, Hand Strap, Size AA Alkaline Battery x 2, etc. |
*1 It may vary based on the environmental conditions, operating conditions, strage time, battery manufacturer, etc.
Approvals
Selectable Gases
arsine【AsH3】, dichlorosilane【SiH2Cl2】, diborane【B2H6】, hydrogen【H2】, semiconductor manufacturing gases, phosphine【PH3】, R407C, R410A
