Portable Gas Detectors

Gas Leak Detector XP-703DIII


  • For gas leak inspection at semiconductor factory where there is toxic gas.
  • Safety for hydrogen-related equipment.


  • Can detect trace amounts of various semiconductor manufacturing gases.
  • Automatic stop pump function
  • Automatic gas exhaust mode
  • Equivalent to IP22 (in soft case)


Model XP-703DIII
Gas Detected Hydrogen, Arsine, Diborane, Silane and Phosphine
Detection Principle Hot wire semiconductor sensor
Sampling Method Extractive
Detectable Leak
H2: 5.07 x 10-7, AsH3: 2.53 x 10-7, B2H6: 1.01 x 10-7, SiH4: 2.53 x 10-7,
PH3: 1.52 x 10-7
Detectable Gas
H2: 1.0ppm, AsH3: 0.5ppm, B2H6: 0.2ppm, SiH4: 0.5ppm, PH3: 0.3ppm
Response Time Within 10 seconds (for 300% of detectable gas concentration)
Power Supply Size AA alkaline batteries x 2
Battery Life*1 Approx. 12 hours
(with size AA alkaline batteries)
Degree of Protection Equivalent to IP22
Operating Pressure Atmospheric pressure (800 to 1100 hPa)
0 to +40°C
Less than 85%RH (with no condensation)
Dimensions Approx. W38 x H130 x D32 mm (excluding protrusions)
Weight Approx. 190g (including batteries and soft case)
Accessories Soft case, Drain Filter, Replacement Filter, Gas Probe, Dust Filter, Hand Strap,
Size AA Alkaline Battery x 2, etc.

*1 It may vary based on the environmental conditions, operating conditions, strage time, battery manufacturer, etc.



Selectable Gases

arsine【AsH3】, dichlorosilane【SiH2Cl2】, diborane【B2H6】, hydrogen【H2】, semiconductor manufacturing gases, phosphine【PH3】, R407C, R410A

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