Portable Semiconductor Gas Detector XPS-7
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- Model
- XPS-7
- Gas Detected
- Semiconductor gases
- Detection Principle
- Electrochemical cell
- Sampling Method
- Extractive
- Weight
- Approx. 1.3kg
Can be used for a variety of semiconductor gases by changing a plug and play gas sensor.
Applications
For gas leak inspection and concentration measurement at semiconductor factory where there is toxic gas.
Features
- A single XPS-7 can be used for a variety of semiconductor gases, simply by changing the sensor unit.
- Cassette-type sensor units eliminate calibration.
Specifications
| Model | XPS-7 |
| Detection Principle | Electrochemical cell |
| Gas Detected | Semiconductor gases |
| Sampling Method | Extractive |
| Detection Range | Depends on the specifications |
| Resolution | 1/100 of full scale |
| Indication Accuracy | ±10% of full scale |
| Alarm Mode | 2nd stage alarm type |
| Alarm Indication | Intermittent buzzer, flashing lamp |
| Response Time | 60s or less (60% response) |
| Operating Temperature | 0 to 40°C |
| Power Source | 4 x AA alkaline dry cells (*1) or an AC adaptor |
| Battery Life*2 | Up to 12 hours (by alkaline dry cells at 20℃ without alarms) |
| Dimensions | W62 x H150 x D128mm (excluding protrusions) |
| Weight | Approx. 1.3kg |
| Standard Accessories | Gas sampling hose with probe, shoulder strap, 4 x AA alkaline dry cells, Spare filters |
| Optional Accessories | AC adaptor (100 VAC/6 VDC), sensor stocker, log data collection kit |
*1 Under identical measuring conditions.
*2 Battery life may vary with ambient conditions, conditions of use, storage period, battery manufactures, etc.
Approvals
Selectable Gases
arsine【AsH3】, ammonia【NH3】, carbon monoxide【CO】, nitric oxide【NO】, hydrogen chloride【HCI】, chlorine【Cl2】, ozone【O3】, chlorine trifluoride【ClF3】, dichlorosilane【SiH2Cl2】, disilane【Si2H6】, diborane【B2H6】, hydrogen bromide【HBr】, hydrogen selenide【H2Se】, sulfur dioxide【SO2】, nitrogen dioxide【NO2】, semiconductor manufacturing gases, hydrofluoric acid【HF】, fluorine【F2】, phosphine【PH3】, germane【GeH4】, silane【SiH4】, hydrogen sulfide【H2S】
